



¤ýXYZ micrometer which enables various photo diode elements to be exactly aligned and fixed
¤ý2D and 3D measurement by rotating ARM and PD
| Range | 51/2Digit Default Resolution |
¡¾(%rdg.+offset) 18¡Æ~28¡ÆC, 0~70% RH |
Typical RMS Noise |
Analog Rise Time |
| 2nA | 10fA | 0.4%+100fA | 20fA | 8ms |
| 20nA | 100fA | 0.4%+1pA | 100fA | 8ms |
| 200nA | 1pA | 0.2%+10pA | 1pA | 500¥ìs |
| 2¥ìA |
10pA | 0.15%+100pA | 10pA | 500¥ìs |
| 20¥ìA | 100fA | 0.1%+1nA | 100pA | 500¥ìs |
| 200¥ìA | 1pA | 0.1%+10nA | 1nA | 500¥ìs |
| 2¥ìA |
10pA | 0.1%+100nA | 10nA | 500¥ìs |
| 20¥ìA | 100fA | 0.1%+1¥ìA | 100nA | 500¥ìs |