



XYZ micrometer which enables various photo diode elements to be exactly aligned and fixed
2D and 3D measurement by rotating ARM and PD
| Range | 51/2Digit Default Resolution |
(%rdg.+offset) 18~28C, 0~70% RH |
Typical RMS Noise |
Analog Rise Time |
| 2nA | 10fA | 0.4%+100fA | 20fA | 8ms |
| 20nA | 100fA | 0.4%+1pA | 100fA | 8ms |
| 200nA | 1pA | 0.2%+10pA | 1pA | 500s |
| 2A |
10pA | 0.15%+100pA | 10pA | 500s |
| 20A | 100fA | 0.1%+1nA | 100pA | 500s |
| 200A | 1pA | 0.1%+10nA | 1nA | 500s |
| 2A |
10pA | 0.1%+100nA | 10nA | 500s |
| 20A | 100fA | 0.1%+1A | 100nA | 500s |